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发明名称
METHOD FOR PROCESSING GAS GENERATED IN MANUFACTURING SEMICONDUCTOR AND GAS SCRUBBER THEREFOR
摘要
申请公布号
KR20010100538(A)
申请公布日期
2001.11.14
申请号
KR20000023747
申请日期
2000.05.03
申请人
JE-IL VACUUM CO., LTD.
发明人
KOO, BON HAK
分类号
(IPC1-7):H01L21/02
主分类号
(IPC1-7):H01L21/02
代理机构
代理人
主权项
地址
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