| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a conductive paste enters a clearance between a ceramic green sheet and a porous sheet when a via hole is filled with the conductive paste to form a via hole conductor, in a state where a negative pressure is applied into the via hole by means of the porous sheet in contact with the ceramic green sheet, and the conductive paste is dried thereafter. SOLUTION: While a porous sheet 16 is kept in contact with a flat suction surface 25 of a suction plate 24, a negative pressure is applied to the porous sheet 16 by means of the suction plate 24. Thus, a conductive paste 17 for a via hole conductor 4 is heated and dried in a state where a ceramic green sheet 8 and the porous sheet 16 are sucked to the suction surface 25. |
