| 发明名称 |
Production of polycrystalline rod involves depositing silicon on carrier rod, rotating polycrystalline silicon rod about a longitudinal axis and cutting rod through with parting tool |
| 摘要 |
A polycrystalline rod (1) is made by depositing silicon on a carrier rod to produce a polycrystalline silicon rod molding; rotating the polycrystalline silicon rod about a longitudinal axis; and cutting the rod through with a parting tool (2).
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| 申请公布号 |
DE10019601(A1) |
申请公布日期 |
2001.10.31 |
| 申请号 |
DE20001019601 |
申请日期 |
2000.04.20 |
| 申请人 |
WACKER-CHEMIE GMBH |
发明人 |
KRAUS, HEINZ;SCHANTZ, MATTHAEUS;NIEDERMEIER, PETER |
| 分类号 |
B26F3/00;B28D5/02;B28D5/04;C01B33/02;C30B13/00;C30B15/00;(IPC1-7):C30B33/00;H01L21/304 |
主分类号 |
B26F3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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