发明名称 METHOD OF PRODUCING THIN FILM AND MANGANESE/BISMUS THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a method of producing a new MnBi thin film, by which the fine structure and crystallinity can be controlled and the MnBi thin film used as a perpendicular magnetic recording material in place of TbFeCo can be obtained, and to provide the new MnBi thin film. SOLUTION: After laminating Mn and Bi layers on a substrate, the laminated layers are heated to 250 to 350 deg.C to form a MnBi seed layer. Then, the MnBi seed layer is heated to 250 to 350 deg.C and at the same time, Mn and Bi elements are simultaneously supplied as molecular beams (atomic beams) onto the MnBi seed layer, thereby the Mn and Bi elements grow epitaxially and the MnBi thin film oriented in the C-axis can be obtained.
申请公布号 JP2001302390(A) 申请公布日期 2001.10.31
申请号 JP20000127890 申请日期 2000.04.27
申请人 TOKYO UNIV OF AGRICULTURE & TECHNOLOGY 发明人 ISHIBASHI TAKAYUKI
分类号 C30B23/02;C30B29/52;G11B5/64;G11B5/65;G11B5/66;G11B5/85;G11B11/105;H01F41/30;(IPC1-7):C30B23/02 主分类号 C30B23/02
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