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发明名称
SPUTTERING TARGET AND METHOD FOR PREPARATION THEREOF
摘要
申请公布号
KR20010093248(A)
申请公布日期
2001.10.27
申请号
KR1020017008548
申请日期
2001.07.05
申请人
发明人
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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