| 摘要 |
PROBLEM TO BE SOLVED: To provide a feedback correction type probe microscope, capable of correcting the image strain caused by a feedback error. SOLUTION: A scanning signal from an XY scanning signal generation section 9, detection results of XY displacement detection sections 10 and 11, and a Z-drive signal from a Z-servo circuit 5 are correlated and stored in the memory section of an image acquisition section 12. A software correction section 22 calculates the Z-drive signal at the specified coordinate position by interpolation from the coordinate position specified by the scanning signal and the detection positions of the XY displacement detection sections 10 and 11 corresponding to it and corrects an image.
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