发明名称 |
Charged particle beam instrument |
摘要 |
A charged particle beam instrument capable of reducing the spread of the probe diameter while maintaining the probe current constant. An electrical current Id is detected by a detection aperture to create a feedback signal. The feedback signal is supplied to a condenser lens control and to an objective lens control via a signal adjuster. The objective lens control portion controls the objective lens such that the charged particle probe is in focus.
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申请公布号 |
US2001032931(A1) |
申请公布日期 |
2001.10.25 |
申请号 |
US20010798881 |
申请日期 |
2001.03.02 |
申请人 |
JEOL LTD. |
发明人 |
MATSUYA MIYUKI |
分类号 |
G01N23/04;G01Q10/00;G21K1/087;G21K7/00;H01J37/10;H01J37/21;H01J37/28;(IPC1-7):G21K7/00;G01N23/00 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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