| 摘要 |
Direct sensing of the gas temperature modulation signal, which is called optothermal sensing, removes the need for a closed or nearly-closed gas cell. The direct sensing of the gas temperature signal is handicapped by a lack of a suitably sensitive (i.e., nanodegree sensitivity) and fast-response gas temperature sensor. The use of a micromachined thermoelectric sensor array does allow suitably sensitive, fast response detection of the small gas temperature modulation signal. Such arrays are conveniently fabricated by silicon micromachining. <IMAGE> |
