MICROSCOPE STAND FOR A WAFER INSPECTION MICROSCOPE,申请号EP19980948717-传众专利搜索

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发明名称	MICROSCOPE STAND FOR A WAFER INSPECTION MICROSCOPE
摘要
申请公布号	EP1018054(B1)	申请公布日期	2001.10.24
申请号	EP19980948717	申请日期	1998.08.04
申请人	LEICA MICROSYSTEMS WETZLAR GMBH	发明人	KACZYNSKI, ULRICH;HEDRICH, ROLAND
分类号	G02B21/24;H01L21/66;(IPC1-7):G02B21/24	主分类号	G02B21/24
代理机构		代理人
主权项
地址

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