| 摘要 |
PURPOSE: To provide a small and inexpensive light intensity measuring apparatus which can measure light intensity of a xenon excimer lamp radiating light having a center wavelength of 172 nm. CONSTITUTION: The light intensity measuring apparatus is provided with an electrooptical transducer 23, preferably as a photodiode with the light sensitivity thereof in the range of 800-1,000 nm, an arithmetic means 25 for relatively determining the intensity of light with the center wavelength of 172 nm, according to the output of the electrooptical transducer 23 and a notifying means 26 to notify the intensity of the light determined by the arithmetic means 25.
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