| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film gas sensor which achieves excellent gas selectivity with a sufficient gas sensitivity. SOLUTION: In the thin-film gas sensor which has a sensitive film electrode 5 formed on a heater layer 3, a sensitive film 6 thereon and moreover, a filter layer 1 thereon, the outer circumference part of the filter layer 7 is positioned inside the outer circumference part of the heater layer 3 to reduce the temperature distribution of the filter layer 7.
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