SEMICONDUCTOR OPTICAL DEVICE WITH GROOVE-EMBEDDED STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor optical device which can be produced with good reproducibility and has high reliability and is useful as a light source of low aspect ratio and of low threshold current. SOLUTION: The semiconductor optical device has a groove at least in a part of a semiconductor substrate or an epitaxial growth layer formed on a semiconductor substrate, and has an active layer and a clad layer formed above and below the active layer inside the groove.