| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the storing/carrying vessel for a semiconductor board capable of making the air of the inside clean. SOLUTION: The semiconductor board 11 is mounted on a semiconductor board carrier 12 having a plurality of slots capable of holding the semiconductor board 11. One or a plurality of detachable adsorption bodies 17 capable of adsorbing an organic matter in the storage carrying vessel 10 is mounted on the vacant slots of the semiconductor board carrier 12. After the semiconductor board carrier 12 mounting the semiconductor board 11 is mounted on a base plate 16, a cover 13 is arranged so as to cover the semiconductor board carrier 12. The cover 13 and the base plate 16 are fixed, and the storage carrying vessel 10 is completely sealed. The adsorption body 17 comprises a silicon wafer on which an adsorbent such as an active carbon or ion exchange resin is coated on the surface, or the silicon wafer having Si-F bonding on the surface.</p> |
