| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method of a coating film, which is capable of uniformly applying a liquid film repeatedly, and a coating device. SOLUTION: A substrate W is placed on a substrate holding part 5 in a substrate stage 1 having the substrate holding part 5 for holding the substrate and peripheral surfaces 1A, 1b and 1C each having a higher than the substrate holding part 5 and the liquid film is formed on the substrate W by relatively moving a coating head 8 of a coating means 2 to the substrate stage 1 to allow the coating range to be coated with the coating liquid P to reach the peripheral surfaces 1A and 1B of the substrate stage 1. The coating liquid P remaining on the peripheral surfaces 1A, 1B and 1C of the substrate stage 1 is removed by relatively moving a liquid absorbing roller 10 of the coating removing means 3 to the substrate stage 1 after the substrate, on which the liquid film is formed, is removed from the substrate stage 1. As a result, the uniformed liquid film is repeatedly formed on the substrate and the uniformity of the liquid film thickness is improved. |
