| 发明名称 |
Apparatus for storing and moving a cassette |
| 摘要 |
<p>A cassette stocker (50) includes a plurality of cassette storage shelves (62a-h) positioned adjacent a cleanroom wall (26) and vertically disposed relative to a plurality of cassette docking stations (40), and a cassette mover (56) to carry a cassette (100) between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette (100) between processing stations. <IMAGE></p> |
| 申请公布号 |
EP1134641(A1) |
申请公布日期 |
2001.09.19 |
| 申请号 |
EP20010104511 |
申请日期 |
2001.03.02 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
NULMAN, JAIM;SIDI, NISSIM |
| 分类号 |
B65G1/00;B65G49/07;H01L21/00;H01L21/673;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):G05D3/00 |
主分类号 |
B65G1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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