| 摘要 |
An ion source device is capable of reducing deterioration of a source due to virulent gas, such as moisture or oxygen, which may adversely affect an ion source, while maintaining the ion source in an ion source driving installation state. An ion source device, which is installed for operation, is supplied with gas, such as inactive gas, which contains a reduced level of gas with possible adverse effect on the ion source, through an ion source driving gas supplying line form the outside of the device, such as a man-made satellite equipped with an ion source. Moreover, inactive gas remaining in a storage vessel provided in the course of the inactive gas supplying line, discharges on itself, thereby continuously purging the ion source.
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