| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent leakage of gas at the periphery of the junction between a support member and a susceptor and at the same time to reduce the gap between the susceptor and a chamber by relaxing tensile stress at the end of the ceramics susceptor of the support member. SOLUTION: This mounting structure is provided with a susceptor 1 to be heated, a support member 2B made of ceramics that is joined to a junction surface 1b of the susceptor 1, and a chamber 13 where an opening 12 that is joined to an end 6 of the support member is provided. The opening of the chamber communicates with an inner space 20 of the support member. The inner space of the support member is airtightly sealed against the inner space 21 of the chamber. When the support member is seen in parallel with the junction surface 1b, an overlapping part 15 where a plurality of ceramics are overlapped is provided.</p> |
