| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine machining method capable of controlling electric characteristics in nanometer order and forming a fine conducting part. SOLUTION: In this fine machining method in which a machining medium whose surface is an oxide is finely machined using a scanning probe, the machining medium is arranged in reducing atmosphere, a voltage is applied through a probe of the scanning probe arranged in opposition to a surface of the machining medium, and a part underneath the probe of the oxide on the surface of the machining medium is reduced to machine the machining medium finely.
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