METHOD OF PRODUCING MONOMER

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a monomer for a resist having a small content of a dehydrated product of an alcohol by an ester interchange reaction. SOLUTION: This raw material monomer for a resist in producing the raw monomer of a polymer for a resist by the ester interchange reaction of a raw material ester with a raw material alcohol, is characterized by dehydrating the raw materials so as to become <=200 ppm water content in the raw material ester and the raw material alcohol and then initiating the ester interchange reaction.