GAS ANALYZER AND DEVICE AND METHOD FOR DIAGNOSTIC GAS LASER

摘要

PROBLEM TO BE SOLVED: To analyze impurity gas in laser medium gas without sampling any laser medium gas in a laser chamber. SOLUTION: For performing gas analysis by FTIR 200, two windows 110, 120 are arranged separately from two windows 13, 14 used for laser oscillation. The FTIR 200 measuring an absorption spectrum of an infrared ray is constructed of a light source 210 arranged on the window 120 side and serving as a light projecting system, a detector 220 arranged on the window 110 side and serving a light receiving system, and an analyzer controller 230 receiving a detection signal from the detector 220 receiving the infrared ray emitted from the light source 210 and performing data processing (computing of an infrared ray absorption spectrum distribution) and controlling on the basis of the detection signal.