Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices

摘要

An electromagnetic system for a variety of applications can be formed through microfabrication techniques. Each segment of a conductive coil associated with an electromagnet is planar making it easy to fabricate the coil through microfabrication techniques. Furthermore, a plurality of magnetic fluxes generated by the electromagnet are dispersed across multiple points in order to reduce problems associated with flux density saturation, and the coil is positioned close to the magnetic core of the electromagnet in order to reduce problems associated with leakage. Accordingly, a low-cost, more efficient electromagnetic system can be batch fabricated through microfabrications techniques.