ELECTRIC SIGNAL-ACOUSTIC SIGNAL TRANSDUCER, ITS MANUFACTURING METHOD, AND ELECTRIC SIGNAL-ACOUSTIC SIGNAL TRANSDUCTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an electric signal-acoustic signal transducer that can easily control the film thickness of a vibration membrane being one electrode of a capacitor and has an excellent acoustic characteristic through the provision of a proper tension and to provide its manufacturing method. SOLUTION: The electric signal-acoustic signal transducer consists of a lower electrode 1, an upper electrode 3 comprising a vibrator 3c and a support 3b supporting the vibrator 3b, and an insulation layer 2 placed between the lower electrode 1 and the upper electrode 3, and the upper electrode 3 has corrugations X, Y at the vibrator 3c and/or the support 3b to form a cavity 4a between the lower electrode 1 and the upper electrode 3.