| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated thin-film capacitor which can be improved in yield, and at the same time, lowered in impedance and a substrate. SOLUTION: This laminated thin-film capacitor is constituted by alternately laminating a plurality of dielectric layers 3 and a plurilty of electrode layers 2 upon another. The thickness of each dielectric layer 3 is adjusted to 200 nm or smaller and the thickness of each electrode layer 2 is adjusted to 2/3 or smaller of that of the dielectric layer 3. In addition, the electrode layers 2 contain a metallic element, having resistivity of 3×10-8Ωm or smaller at 0 deg.C as the main component.
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