| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pitch-converting mechanism for infinitely converting pitches of a plurality of wafers by adjusting a gap between a pair of wafers. SOLUTION: A plurality of wafer-holding plates 3 is fitted loose to a guide axis 2, which is fixed on a fixed base 1 of a pitch-converting mechanism, and pivot pins 13 are provided on fixed parts on the sides of the holding plates 3. A pair of link plates 10r and 10f, having the same strip shapes, pivot the pivot pins 13 in X shapes at pivot holes 12 at the center. The pivot holes 12 at the center penetrate connecting holes 14m and 14n provided on the ends along the length. The connecting holes 14m and 14n on the ends of the link plate 10r on the pivot pin 13 are respectively connected to the corresponding connecting holes 14m and 14n, which are provided on the other link plate 10f of the pair of link plates on the pivot pins 13 of the holding plates 3 which are adjacent to the corresponding holding plate, such that the connecting holes 14m and 14n can rotate freely via connecting pin 15m and 15n. With an adjusting means for changing a gap between any one of the holding plates 3 and the base 1 or another holding plate 3, it is possible to convert the pitches of the plurality of holding plates.</p> |
