| 摘要 |
PROBLEM TO BE SOLVED: To achieve a higher accuracy of a correction shape of a surface to be inspected regardless of possible positional deviation of both of an absolute shape of a reference surface and a relative shape therepf on a screen and any difference in photographing magnification and measuring instrument by carrying out a coordination conversion of a function according to the absolute shape based on a difference in measuring conditions pertaining to a coordinate in the measurement of the relative shape and the absolute shape at a state prior to the computation made to subtract the absolute shape from 'a surface to be inspected-the relative shape of the reference surface' obtained using an interferometer. SOLUTION: Prior to the computation made to subtract an absolute shape of a reference surface from 'a surface to be inspected-a relative shape of the reference surface' obtained using an interferometer, measuring conditions pertaining to a coordinate in the main measurement made for the relative shape are compared with measuring conditions pertaining to a coordinate in the preliminary measurement made for the shape of the reference surface and based on the results of the comparison, a function a (x, y) corresponding to the shape of the reference surface 2a obtained by the preliminary measurement is converted to a function a' (x, y) on the coordinate in the main measurement so that both the shapes are set to correspond to each other on the same coordinate in a screen.
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