发明名称 Self-alignment hybridization process and component
摘要 A method of forming a hybrid optical component (60) includes the steps of masking and etching a pattern on a core layer (14) of a planar optical component (20) to define at least one alignment element (17,19) and an optical element and subsequently overcladding the optical element (20) such that a passive platform is formed which exposes a surface of the optical element such as a waveguide (20) and an alignment element for receiving a mirror image alignment element formed on an active platform (50) including an active device, such as a laser. Hybrid components include a passive platform (40) having an alignment element formed therein and a waveguide (20) for receiving an active platform (50) with a mating mirror image alignment element (58,62) and an active device (54) which aligns with the waveguide (20) when the platforms are mated. Such a fabrication method and resulting optical component provide a highly efficient, self-aligning passive and active component platforms which greatly reduce the cost of fabrication of hybrid optical circuits as well as improve their reliability and reduce their cost. <IMAGE>
申请公布号 EP1120672(A1) 申请公布日期 2001.08.01
申请号 EP20000400201 申请日期 2000.01.25
申请人 CORNING INCORPORATED 发明人 ALIBERT, JEAN-MARIE GUILHEM
分类号 G02B6/13;G02B6/42;G03F7/20 主分类号 G02B6/13
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