| 摘要 |
<p>PROBLEM TO BE SOLVED: To eliminate the need for an exclusive camera for calibrating offset when using a reference member for calibrating offset. SOLUTION: An axis center 4a of a tool 4 is brought closer to a reference member 30, laser diodes 16 and 17 are sequentially turned on for picking up the images of the reference member 30 and the tool 4 in X and Y directions by a camera 7 for detecting positions, and the amount of deviation of the tool 4 and the reference member 30 is measured. The camera 7 for detecting positions is brought closer to the reference member 30 to measure the amount of deviation between a light axis 7a of the camera 7 for detecting positions and the reference member 30 using the camera 7 for detecting positions. Based on the measurement values and the amount of travel, an accurate amount of offset is obtained. The image light of the tool 4 and the reference member 30 is guided to the camera 7 for detecting positions by prisms 13, 14, and 18, and a half mirror 15, thus eliminating the need for an exclusive camera for detecting the amount of deviation between the tool 4 and the reference member 30.</p> |
