Micro-electro-mechanical optical device

摘要

A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electromechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.