| 摘要 |
PROBLEM TO BE SOLVED: To provide a working method for an Mg evaporation material capable of preventing the generation of dust. SOLUTION: In this working method in which an Mg pellet obtained by subjecting an extruding raw material of Mg to extrusion molding to form a wire rod and cutting the same to a suitable length is used as an Mg evaporation material and is packed in a sealed state, the hot extrusion, cutting and the removal of a surface layer are executed in an atmosphere of inert gas such as dry nitrogen or argon, and immediately after the cutting, the packing is executed. The inside of a packing container is dearated and the dry nitrogen is inclosed at the time of packing. Before the packed Mg pellet is unpacked and is fed to an evaporation source, surface polishing is executed to the Mg pellet by a chemical polishing solution which does not use water to reduce the thickness of an oxidized film on the surface. Acetone of high purity is used as the chemical polishing solution, and, after the surface polishing, the Mg pellet is dried by the vapor of dichloromethane.
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