| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device that uses exhausted compressed gas without waste and easily separates a substrate from a support surface. SOLUTION: This substrate conveying device 1 conveys a substrate W loaded on the support surface (loading table 3) by suction and fixing, and includes a plurality of substrate sucking/fixing unit 10 comprising a suction chuck 20 for sucking and fixing the substrate W and an ejector mechanism 30 for generating a suction force Z by circulation of the compressed gas. The ejector mechanism comprises a gas feeding part 31 through which the compressed gas (fed gas X) is fed from an air feeding pipe 41, an exhaust gas part 32 through which the compressed gas (exhaust gas Y) is exhausted toward an exhaust gas pipe 42, and a negative pressure chamber 33 that is formed at the intersection between them and makes inside pressure negative by circulation of the compressed gas, and an intake air part 34 that communicates between the negative pressure chamber and the suction chuck and generates the suction force inside. The exhaust gas pipe communicates with an exhaust gas pressure 17 for blowing out the exhausted compressed gas (exhaust gas Y) from exhaust gas opening 18 toward a gap between the substrate W and the support surface.
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