METHOD AND DEVICE OF MICROFABRICATION

摘要

PROBLEM TO BE SOLVED: To form a microscopic hole which is hardly made by a drilling machine on a composite material member such as a multi-layer substrate. SOLUTION: Liquid molecular seed is supplied to the tip of a needle-shaped member 101 of an electrically conductive material which is placed opposite to an object to be machined, and a cathode voltage is applied to the molecular seed to produce a tunnel effect on it. Cations generated the tunnel effect from the molecular seed impinge on the object to be machined, and the object to be machined is microscopically machined by the impinging cations.