| 摘要 |
This invention presents a substrate transfer system comprising a transfer robot which transfers a substrate, and a retainer which temporarily retains the substrate while the substrate is transferred. The transfer robot has an arm at which fore end a substrate support for supporting the substrate is provided, and a driver which makes the arm perform expansion, contraction, rotation and lifting motion, thereby transferring the substrate to a position. The substrate is retained temporarily with the retainer while the transfer robot rotates the arm and the substrate support together to change the direction of the expansion and the contraction motion of the arm. This invention also presents a substrate processing apparatus comprising a process chamber in which a process is carried out on the substrate, a load lock chamber in which the substrate stays temporarily while it is transferred to the process chamber, and a transfer chamber in which a substrate transfer system is provide. The substrate transfer system transfers the substrate between the load lock chamber and the process chamber.
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