PIEZOELECTRIC ACTUATOR AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A method for manufacturing a piezoelectric actuator is provided to increase productivity and to decrease a driving voltage for driving the actuator, by eliminating an adhesion layer so that lead time is shortened and manufacturing cost is reduced. CONSTITUTION: A piezoelectric layer(26) for actuating is formed when a voltage is applied. A lower electrode(24) is formed under the piezoelectric layer. A vibration plate playing the intermediate role of actuating of the piezoelectric layer is formed by plating under the lower electrode. A chamber plate is formed by plating under the vibrating plate. The chamber plate is patterned and etched to form a chamber(25) storing ink. The piezoelectric layer is patterned and etched. An upper electrode(28) of a specific pattern is formed on the piezoelectric layer.