| 摘要 |
PURPOSE: A multi-layered extension stage is to simultaneously perform a loading and unloading operation of a substrate, thereby remarkably reducing a processing time of an LCD(liquid crystal display). CONSTITUTION: The first and second substrate supporting plate respectively support each substrate at a different height to avoid interruption between the substrates, which are respectively moved in opposite directions. A depositing unit(20) and a patterning unit(32) are disposed to interpose a multi-layered extension stage(28) therebetween. The first robot is(26) disposed between the extension stage and the depositing unit to transfer the substrate to the extension stage and the depositing unit. The second robot(30) is disposed between the extension stage and the patterning unit to transfer the substrate to the extension stage and the patterning unit. The first and second robots are respectively driven horizontally and vertically. The first robot transfers the substrate from the depositing unit to the first substrate supporting plate. The second robot transfers the substrate from the first substrate supporting plate to the patterning unit. |
