| 摘要 |
PURPOSE: A wafer cassette of a front open unified pod(FOUP) type is provided with a simple structure to reduce errors in operation and also to prevent damage thereof. CONSTITUTION: The wafer cassette(100) includes a cassette body(200) and a twofold door(300). The cassette body(200) has slots formed therein to hold a plurality of wafers, and a doorway through which the wafer is loaded or unloaded. The twofold door(300) opens or shuts the doorway of the cassette body(200) by an opener. In addition, a pair of guide bars(210) are formed at both sides of the doorway, and a supporting plate(220) is formed under the guide bars(210). The twofold door(300) is inserted into the guide bars(210) and then supported by the supporting plate(220). The twofold door(300) has a main door(310) and an auxiliary door(320). The main door(310) has a slit(311) formed in one side end thereof to admit the opener thereinto, while the auxiliary door(320) faces the main door(310) at close range. The main door(310) and the auxiliary door(320) are connected to a connector capable of adjusting a distance therebetween.
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