IODONIUM SALT AS LATENT ACID DONOR

摘要

PROBLEM TO BE SOLVED: To obtain a radiation sensitive composition having a high sensitivity, good preservation stability and an optimum balance between good solubility and difficulty in crystallization. SOLUTION: This radiation sensitive composition contains (a1) a compound capable of being polymerized or cross-linked by a cation or an acid catalyst or (a2) a compound capable of raising solubility in a developing solution under the action of an acid and (b) at least one diaryliodonium salt expressed by formula I [wherein X is a 3-20C branched alkyl or the like; X1 is H or the like; Y is a 1-10C straight chain alkyl or the like; A- is a non-nucleophilic anion such as a group: (BF4)- or the like].