发明名称 ALKYLATED AMINOALKYL PIPERAZINE SURFACTANT AND UTILIZATION THEREOF IN PHOTORESIST DEVELOPER
摘要 PROBLEM TO BE SOLVED: To provide an aqueous composition capable of decreasing equilibrium and dynamic surface tension, particularly a composition for coating materials, inks, storage liquids, adhesives, fertilizer and photoresist development/electronics cleaning. SOLUTION: An alkylated amino alkyl piperazine compound expressed in formula I is blended by the quantity enough to decrease the surface tension. (In the formula, one of R1 and R2 represents a 5-14C alkyl or cycloalkyl group and the remainder represents H or both of R1 and R2 represent a 5-8C alkyl group and (n)/represents 2 or 3.).
申请公布号 JP2001175005(A) 申请公布日期 2001.06.29
申请号 JP20000312305 申请日期 2000.10.12
申请人 AIR PROD AND CHEM INC 发明人 LASSILA KEVIN RODNEY;CARR RICHARD V C;MINNICH KRISTEN ELAINE
分类号 C11D1/40;C11D3/20;C11D3/26;C11D17/08;G03F7/32;H01L21/027;H01L21/304;(IPC1-7):G03F7/32 主分类号 C11D1/40
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