| 摘要 |
PROBLEM TO BE SOLVED: To improve the throughput of an optical edge bead removing device. SOLUTION: Light source units 14A and 14B are movable in±X direction in the diagram along a support member 12. While a beam is emitted from the light source units 14A and 14B, the support member 12 is travelled in±Y direction in the diagram, so that a photoresist in the periphery of a glass board G is exposed. When the light source units 14A and 14B move in the±X direction along the supporting member 12, a distance between the light source units 14A and 14B is controlled to be a specified value or more. Masks 16A and 16B are driven in the±X direction in the diagram, and when there is a part in an area subject to peripheral exposure that requires no irradiation, the masks 16A and 16B cover the glass board G partly to shield the light.
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