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发明名称
NANOPOROUS SILICA VIA COMBINED STREAM DEPOSITION
摘要
申请公布号
EP1110239(A1)
申请公布日期
2001.06.27
申请号
EP19990939736
申请日期
1999.08.13
申请人
ALLIEDSIGNAL INC.
发明人
WU, HUI-JUNG;DRAGE, JAMES, S.;BRUNGARDT, LISA, BETH;RAMOS, TERESA;SMITH, DOUGLAS, M.
分类号
C08J7/06;C08G77/02;H01L21/312;H01L21/314;H01L21/316;(IPC1-7):H01L21/316
主分类号
C08J7/06
代理机构
代理人
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地址
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