发明名称 |
Differential pulsed laser beam probing of integrated circuits |
摘要 |
A laser beam is used to probe an integrated circuit device under test. A single laser provides a single laser pulse which is divided into two pulses, both of which are incident upon the device under test. After the two pulses interact with the device under test, the two pulses are separated and detected by two photo detectors. The electrical signals output by the photo detectors are then subtracted, which cancels out any common mode noise induced on both pulses including noise due to mechanical vibration of the device under test and also any noise from the laser. The difference signal can be used to reproduce a time varying signal in the device under test.
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申请公布号 |
US6252222(B1) |
申请公布日期 |
2001.06.26 |
申请号 |
US20000483463 |
申请日期 |
2000.01.13 |
申请人 |
SCHLUMBERGER TECHNOLOGIES, INC. |
发明人 |
KASAPI STEVEN A.;TSAO CHUN-CHENG;SOMANI SEEMA |
分类号 |
G01R31/26;G01N21/00;G01N21/01;G01R1/06;G01R15/24;G01R31/302;G01R31/308;H01L21/66;(IPC1-7):G01R31/265 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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