| 摘要 |
A displacement sensor (2) is coupled to the probe (1) through suspension (3). The probing surface (11) contacting object is maintained at specific gap from the sensor surface (12). The gap between surfaces (11,12) relevant to measurement point (121) is changed, by applying force along the point. The gap variation between point and sensor surface is measured, to estimate object dimension. The displacement sensor is sealed hermetically with the probe and suspension. The probe is made of diaphragm with sensor arranged corresponding to the point. The gap between the sensor and probe surfaces is changed, depending on the applied force. Independent claims are also included for the following: (a) Dimension inspection measurement; (b) Dimension inspection method
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