METHOD FOR MANUFACTURING MULTICOMPONENT OXIDE FERROELECTRIC THIN FILM INCLUDING VOLATILE COMPONENT

摘要

PURPOSE: A method for manufacturing a multicomponent oxide ferroelectric thin film including a volatile component is provided to control loss of a volatile component generated in forming the multicomponent oxide thin film by using a radio frequency(RF) magnetron sputtering method. CONSTITUTION: A target(15) composed of a multicomponent oxide material is sputtered to form a multicomponent oxide thin film on a substrate by a radio frequency(RF) magnetron sputtering method. A vacuum chamber where the sputtering process is performed is maintained at a pressure from 200 to 300 milli Torr to reduce loss of a volatile component of the thin film during the sputtering process.