PLASMA DEVICE INCLUDING A POWERED NON-MAGNETIC METAL MEMBER BETWEEN A PLASMA AC EXCITATION SOURCE AND THE PLASMA,申请号IL19980137070-传众专利搜索

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发明名称	PLASMA DEVICE INCLUDING A POWERED NON-MAGNETIC METAL MEMBER BETWEEN A PLASMA AC EXCITATION SOURCE AND THE PLASMA
摘要
申请公布号	IL137070(D0)	申请公布日期	2001.06.14
申请号	IL19980137070	申请日期	1998.12.31
申请人	LAM RESEARCH CORPORATION	发明人
分类号	H05H1/46;C23C14/34;H01J37/32;(IPC1-7):H01J	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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