发明名称 |
PATTERN FORMATION METHOD USING LIGHT-INDUCED SUPPRESSION OF ETCHING |
摘要 |
A method of selectively etching a substrate ( 1 ) comprises applying etchant ( 4 ) at a surface of the substrate and illuminating an area of the surface with light from a light source ( 7 ), whereby etching is at least partially inhibited in the illuminated area ( 18 ) of the substrate. Preferably LiNbO3 is patterned in HF KOH, or HF-HNO3 solutions by selective illumination using UV laser light with 300 to 1000 mn wavelength, thereby allowing for interferometric or holographic structures to be formed. |
申请公布号 |
EP1105920(A1) |
申请公布日期 |
2001.06.13 |
申请号 |
EP19990934886 |
申请日期 |
1999.07.20 |
申请人 |
THE SECRETARY OF STATE FOR DEFENCE |
发明人 |
EASON, ROBERT WILLIAM;BARRY, IAN ERIC;SMITH, PETER GEORGE ROBIN;ROSS, GRAEME WILLIAM |
分类号 |
C03C15/00;C30B33/00;G11B7/26;H01L21/306;H01L21/3063 |
主分类号 |
C03C15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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