发明名称 Multi-layered ceramic substrate manufacture involves preparing raw compound multilayer body with metallic foils, and baking it while restraining contraction of green sheets in direction of main surface
摘要 A raw compound multilayer body (13) with metallic foils (11,12) is prepared. The metallic foils are set to cover both main surfaces of a raw laminate structure (10) consisting of laminated ceramic green sheets (5). The multilayer body is baked at a temperature lower than the melting point of metallic foil while restraining the contraction of green sheets in the direction of main surface by the foils. The ceramic green sheets are provided with electric conducting pastes (7) so that internal wiring conductors (8,9) may be formed. The outer-conductor films (3,4) are formed by performing the etching process of the metallic foil and performing a patterning based on a photolithography technique after baking.
申请公布号 DE10041623(A1) 申请公布日期 2001.06.07
申请号 DE2000141623 申请日期 2000.08.24
申请人 MURATA MFG. CO., LTD. 发明人 SAKAI, NORIO
分类号 H01B19/00;H01L21/48;H01L23/12;H05K1/03;H05K3/46;(IPC1-7):H05K3/46 主分类号 H01B19/00
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