SYSTEM FOR DETECTING CLAMP OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To detect whether a substrate is in a clamped or unclamped state on a robot blade. SOLUTION: Whether the substrate 18 is in the clamped or unclamped state on the robot blade 16 is decided first. In the case that the substrate 18 is correctly clamped, the center of the substrate is decided so as to correct all the misalignments of the center to the reference position of the blade 16.