MANUFACTURING METHOD FOR COMPOUND SEMICONDUCTOR SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide the manufacturing method of a compound semiconductor solar battery for improving crystallinity in a p-type semiconductor layer in manufacturing the compound semiconductor solar battery of pn-junction, which is provided with the p-type semiconductor layer that is mainly formed of copper (Cu) and indium (In). SOLUTION: A metallic film where an indium layer 13 and a copper layer 15 are laminated is formed on a molybdenum layer 12 as an electrode film formed on one side of a glass substrate 10. A solfuration processing is executed on the metallic film and a p-type semiconductor layer 14 formed of CUInS2 is formed. Then, the p-type semiconductor layer 14 is cleaned by KCN solution and a KCN processing for removing the impurity of copper sulfide is executed. An n-type semiconductor layer 16 is formed on the p-type semiconductor layer 14. In manufacturing a compound semiconductor solar battery, the indium layer 13 is formed by evaporation while it is heated.