SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor inspection device and a semiconductor inspection method securing the compatibility of both electromagnetic environment and normal operation in a semiconductor device to improve the quality of the semiconductor device, and not requiring a dedicated board and device for every semiconductor device for estimating the electromagnetic environment compatibility to reduce the development man-hours and the cost of the semiconductor device. SOLUTION: This general-purpose semiconductor inspection device has a configuration and a method for inspection for securing the normal operation and an electromagnetic interference property measurement device 12 and an electromagnetic interference property measurement method for inspection for securing an electromagnetic interference property. Thereby, the semiconductor inspection device can inspect the normal operation and the electromagnetic interference property of the semiconductor device 1 in the same one process when executing shipment inspection.