| 摘要 |
PROBLEM TO BE SOLVED: To precisely control a flow rate with reproducibility by a simple device advantageous in cost in a micro flow rate range comprising the area of not more than 1×10-6 L/s as a volume flow rate. SOLUTION: In flow passages 2 and 3 having differential pressure, a capillary 4 whose diameter is not more than 1 mm and whose sectional area is constant is installed and an outer periphery is formed. A thin bar-like control bar 5 having the constant sectional area is arranged in the capillary 4 of the constant sectional area in the axial direction of the capillary so that a position can variably be controlled. A circular flow passage 6 with a small gap is constituted in the capillary of the constant sectional area so that length can be varied. Resistance with respect to the flow of the flow passage is made to correspond to a laminar flow or molecular flow. The position in the axial direction of the control bar is varied and control is executed within the range of a micro flow rate.
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