| 摘要 |
PROBLEM TO BE SOLVED: To provide an efficient method for easy defect inspection and repair together with the structure of a micro thermoelectric power generating element. SOLUTION: A process to form a thermoelectric power generating element block 53 where a plurality of n-type rod-like elements 51 of an n-type thermoelectric semiconductor and a plurality of p-type rod-like elements 52 of p-type thermoelectric semiconductor are regularly arranged and fixed through an insulating layer 50, a process to flatten the wiring end surface of the thermoelectric power generating element block 53 and an insulating layer in the same plane with the wiring end surface, a process to expose the n-type rod-like element 51 and p-type rod-like elements 52 on a non-wiring surface of the block 53, and a process where the end parts of p-type rod-like elements 52 and n-type rod-like elements 51 are connected in series with a conductor 58 to form a plurality of serial thermocouples, and on the exposed n-type rod-like elements 51 and p-type rod-like elements 52, an inspection/repairment electrode comprising a conductor 58 integral with the conductor 58 at the outer peripheral part of the wiring pattern is formed, are provided.
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